Fluorine-containing silica glass

Details Fluorine-containing silica glass Fluorine-containing silica glass

1997-08-21

1999-09-28

Group, Karl

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

501 37, 501 57, 501905, C03C 306, C03C 1304

Patent

active

059588098

ABSTRACT:
The invention relates to fluorine-containing silica glasses, and methods of their production. The silica glass may be used for an ultraviolet light optical system in which light in a wavelength region of 200 nm or less, such as an ArF (193 nm) excimer laser, is used. The invention also relates to a projection exposure apparatus containing fluorine-containing glass of the invention.

REFERENCES:
patent: 5086352 (1992-02-01), Yamagata et al.
patent: 5325230 (1994-06-01), Yamagata et al.
patent: 5326729 (1994-07-01), Yaba et al.
patent: 5679125 (1997-10-01), Hiraiwa et al.

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