Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Reexamination Certificate
2001-01-16
2003-01-07
Nutter, Nathan M. (Department: 1711)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Mixing of two or more solid polymers; mixing of solid...
C525S200000
Reexamination Certificate
active
06503986
ABSTRACT:
TECHNICAL FIELD
The present invention relates to a fluorine-containing rubber composition and a molded article obtained from the composition, particularly a sealing material for semi-conductor production apparatuses.
BACKGROUND ART
In case of producing a sealing material, etc. by molding a composition containing a fluorine-containing rubber, addition of fillers such as a carbon black, silica, metal oxide and fluorine-containing resin fine particles has been carried out in order to maintain a shape of the sealing material, etc. by imparting a strength thereto,
However recently with the development of high performance device, high cleanliness has come to be demanded particularly on a sealing material used for semi-conductor production apparatuses, and there arose a problem that the addition of such fillers became an obstacle to cleanliness of the sealing material.
The inventors of the present invention have found that by mixing a thermoplastic fluorine-containing rubber to a fluorine-containing rubber and using no fillers, it is possible to obtain a fluorine-containing rubber composition which is suitable for a sealing material for semi-conductor production apparatuses, imparts a strength to the sealing material and meets a demand for cleanliness.
An object of the present invention is to obtain a fluorine-containing rubber composition which can provide a clean sealing material for semi-conductor production apparatuses without using fillers.
DISCLOSURE OF INVENTION
The present invention relates to the fluorine-containing rubber composition comprising (a-1) a non-perfluoro fluorine-containing rubber and (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit.
Also the present invention relates to the fluorine-containing rubber composition comprising (a-1) a non-perfluoro fluorine-containing rubber and (b-2) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; a structural unit of the elastomeric fluorine-containing polymer chain segment comprises not less than 90% by mole of a perhalo olefin unit and a structural unit of the non-elastomeric fluorine-containing polymer chain segment comprises less than 90% by mole of a perhalo olefin unit.
In those cases, it is preferable that the non-perfluoro fluorine-containing rubber (a-1) is a vinylidene fluoride fluorine-containing rubber, tetrafluoroethylene/propylene fluorine-containing rubber, fluoro silicone fluorine-containing rubber or fluoro phosphazine fluorine-containing rubber.
Further the present invention relates to the fluorine-containing rubber composition comprising (a-2) a perfluoro fluorine-containing rubber and (b-3) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; a structural unit of the elastomeric fluorine-containing polymer chain segment comprises less than 90% by mole of a perhalo olefin unit and a structural unit of the non-elastomeric fluorine-containing polymer chain segment comprises not less than 90% by mole of a perhalo olefin unit or less than 90% by mole of a perhalo olefin unit.
Further the present invention relates to the fluorine-containing rubber composition comprising (a-2) a perfluoro fluorine-containing rubber and (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit.
Further the present invention relates to the fluorine-containing rubber composition comprising (a-2) a perfluoro fluorine-containing rubber and (b-2) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; a structural unit of the elastomeric fluorine-containing polymer chain segment comprises not less than 90% by mole of a perhalo olefin unit and a structural unit of the non-elastomeric fluorine-containing polymer chain segment comprises less than 90% by mole of a perhalo olefin unit.
In those cases, it is preferable that the perfluoro fluorine-containing rubber (a-2) is a fluorine-containing elastic copolymer comprising 45 to 90% by mole of tetrafluoroethylene, 10 to 50% by mole of perfluoro(alkyl vinyl ether) and 0 to 5% by mole of monomer giving a cure site.
BEST MODE FOR CARRYING OUT THE INVENTION
The greatest feature of the fluorine-containing rubber composition of the present invention is to impart a strength by adding the thermoplastic fluorine-containing rubber (b) to the fluorine-containing containing rubber (a) without using a filler and to enhance ability of maintaining a shape of a molded article.
Examples of the fluorine-containing rubber (a) which can be used in the present invention are (a-1) a non-perfluoro fluorine-containing rubber and (a-2) a perfluoro fluorine-containing rubber.
Also examples of the thermoplastic fluorine-containing rubber (b) which can be used in the present invention are: (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit, (b-2) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; a structural unit of the elastomeric fluorine-containing polymer chain segment comprises not less than 90% by mole of a perhalo olefin unit and a structural unit of the non-elastomeric fluorine-containing polymer chain segment comprises less than 90% by mole of a perhalo olefin unit, and (b-3) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; a structural unit o f the elastomeric fluorine-containing polymer chain segment comprises less than 90% by mole of a perhalo olefin unit and a structural unit of the non-elastomeric fluorine-containing polymer chain segment comprises not less than 90% by mole of a perhalo olefin unit or less than 90% by mole of a perhalo olefin unit.
Firstly the first fluorine-containing rubber composition of the present invention is explained below. The first fluorine-containing rubber composition of the present invention comprises (a-1) a non-perfluoro fluorine-containing rubber and (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment; structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit.
Examples of the non-perfluoro fluorine-containing rubber (a-1) are vinylidene fluoride (VdF) fluorine-containing rubber, tetrafluoroetylene (TFE)/propylene fluorine-containing rubber, tetrafluoroetylene (TFE)/propylene/vinylidene fluoride fluorine-containing rubber, ethylene/hexafluoropropylene (HFP) fluorine-containing rubber, ethylene/hexafluoropropylene (HFP)/vinylidene fluoride (VdF) fluorine-containing rubber, ethylene/hexafluorop
Irie Sadashige
Kishine Mitsuru
Noguchi Tsuyoshi
Tanaka Hiroyuki
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