Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1997-09-24
2000-07-04
Gulakowski, Randy
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134 12, 438725, 118723R, B08B 600, C25F 330
Patent
active
060823747
ABSTRACT:
A method for removing material from a substrate. A plasma is generated in a plasma generating and discharge device including a sapphire plasma tube. At least one fluorine-containing compound is introduced into the plasma. A forming gas is introduced into the plasma. The plasma is directed toward the material to be removed from the substrate.
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Huffman Maria
Noble Thomas
Sakthivel Palanikumaran
Zimmerman Teresa
Chaudhry Saeed
Gulakowski Randy
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