Fluorinated sulfonamide surfactants for aqueous cleaning...

Details Fluorinated sulfonamide surfactants for aqueous cleaning... Fluorinated sulfonamide surfactants for aqueous cleaning...

2007-11-13

2007-11-13

Webb, Gregory (Department: 1751)

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

C510S176000, C134S001300

Reexamination Certificate

active

10792456

ABSTRACT:
Described are anionic N-substituted fluorinated sulfonamide surfactants, and use thereof in cleaning and in acid etch solutions. The cleaning and etch solutions are used with a wide variety of substrates, for example, in the cleaning and etching of silicon oxide-containing substrates.

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