Fluorinated cycloolefin polymers, processes for preparation...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...

Reexamination Certificate

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C525S332100, C525S338000, C525S339000, C525S356000

Reexamination Certificate

active

06875819

ABSTRACT:
The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 μm−1at 157 nm of ultraviolet rays.wherein R1to R12are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; X1is —CRaRb—, —NRa— or —PRa— (Raand Rbare each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, —O—, —S—, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of R1to R12and X1is fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.

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XP-002241583 (9 pages).
XP-002241506 (1 page).
T.M. Bloomstein et al.; J. Vac. Sci. Technol. B 15(6), Nov./Dec. 1997, pp. 2112-2116.
Hiroshi Ito et al.; 1998 American Chemical Society Symposium, Ser. 706, Chapter 16, pp. 208-223.

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