Fluorinated compound, fluoropolymer and process for its...

Details Fluorinated compound, fluoropolymer and process for its... Fluorinated compound, fluoropolymer and process for its...

2005-02-22

2005-02-22

Wu, David W. (Department: 1713)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C525S215000, C525S221000, C525S222000, C526S253000, C570S136000

Reexamination Certificate

active

06858692

ABSTRACT:
A fluoropolymer having repeating units formed by cyclopolymerization of a functional group-containing fluorinated diene represented by the following formula:in-line-formulae description="In-line Formulae" end="lead"?CF2═CR1-Q-CR2═CH2  (1)in-line-formulae description="In-line Formulae" end="tail"?wherein each of R1and R2which are independent of each other, is a hydrogen atom, a fluorine atom, an alkyl group having at most 3 carbon atoms, or a fluoroalkyl group having at most 3 carbon atoms, and Q is a bivalent organic group having a functional group bonded thereto, and a production method which comprises subjecting the above diene to radical polymerization. The polymer has a high Tg and a functional group concentration sufficient to exhibit the characteristics thereof.

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Ito et al., “Polymer Design for 157 nm Chemically Amplified Resists”, Proceeding of SPIE, vol. 4345, pp. 273-284, (2001).

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