Fluoresence imaging

Details Fluoresence imaging Fluoresence imaging

1994-01-05

1996-03-12

O'Shea, Sandra L.

Electric lamp and discharge devices

Cathode ray tube

Screen

313468, 313474, H01J 2920

Patent

active

054989230

ABSTRACT:
A single crystal fluorescent material is used in the conversion of a short wavelength image. Conversion to a long wavelength image in the visible spectrum permits use of conventional glass optics for visual observation of UV and x-ray images. An illustrative use is in inspection of masks designed for use in fabrication of large scale integrated circuitry built to submicron design rules.

REFERENCES:
patent: 3917950 (1975-11-01), Carlson
patent: 4739399 (1988-04-01), Swann et al.
patent: 4835437 (1989-05-01), Berkstresser et al.
patent: 5107173 (1992-04-01), Iwasaki
patent: 5177400 (1993-01-01), Iwasaki

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