Fluorescent X-ray spectroscopic apparatus

Details Fluorescent X-ray spectroscopic apparatus Fluorescent X-ray spectroscopic apparatus

2006-04-17

2008-09-09

Kao, Chih-Cheng G (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Fluorescence

C378S045000

Reexamination Certificate

active

07424092

ABSTRACT:
An apparatus and method for accurately analyzing transition metal such as iron and copper contained as impurities in a hafnium-containing film on a semiconductor substrate, which is a sample, is provided. Ir-Lα rays selected and split by a monochromator from X rays generated from an X-ray tube having an anode containing iridium, is applied to the sample so as to totally reflect on a hafnium film of the sample, and the fluorescent X rays generated in a direction other than the total reflection direction are detected by a detector. This makes it possible not only to detect Fe—Kα rays, but also to suppress generation of Hf-Lα rays which interferes with detection of Cu—K rays, and to shift the upper limit energy of the Raman scattering to be small so as to cancel overlapping with Cu—K rays.

REFERENCES:
patent: 5732120 (1998-03-01), Shoji et al.
patent: 2843529 (1999-01-01), None
patent: 2006053012 (2006-02-01), None

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