Fluorescent X-ray film thickness measuring apparatus

Details Fluorescent X-ray film thickness measuring apparatus Fluorescent X-ray film thickness measuring apparatus

1993-04-07

1994-03-29

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378205, 378 44, 378151, G21K 102

Patent

active

052992527

ABSTRACT:
A fluorescent X-ray thin film measuring apparatus having a collimator with an aperture which forms a primary X-ray beam to have a long and narrow cross-sectional shape and which can be rotated about the axis of the X-ray beam, and a display device for observing a sample surface by superposing a pattern on the sample surface, the pattern showing the angular position of the collimator aperture which defines the angular position of the long and narrow cross-sectional shape of the primary X-ray beam.

REFERENCES:
patent: 5237599 (1993-08-01), Gunji et al.

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