Fluorescent x-ray film thickness gauge

Details Fluorescent x-ray film thickness gauge Fluorescent x-ray film thickness gauge

1989-11-15

1991-10-22

Westin, Edward P.

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378 46, 378 54, 378149, 378148, G01N 23223

Patent

active

050602470

ABSTRACT:
A fluorescent X-ray film thickness gauge having an X-ray source for generating incident X-rays, a shutter device for shuttering the incident X-rays, a collimator for collimating the incident X-rays, a sample stage for mounting a sample onto which the collimated X-ray is irradiated, and a detector for detecting fluorescent X-rays generated from the sample upon irradiation of the collimated X-rays. The shutter device includes a switching mechanism operable to switch the shutter device between a measurement state and a calibration state, a shutter frame, and a shutter member disposed in the shutter frame and having a measurement passage, a calibration passage and a calibration plate in the calibration passage. The shutter member is selectively settable by the switching mechanism in the measurement state such that the measurement passage is positioned to transmit therethrough the incident X-rays to direct the same to the sample to effect measurement of a film thickness of the sample and in the calibration state such that the calibration passage is positioned to transmit therethrough the incident X-rays to direct the same to the calibration plate so that fluorescent X-rays are emitted from the calibration plate into the detector to thereby effect calibration of the gauge.

REFERENCES:
patent: 4928293 (1990-05-01), Behncke

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