Fluorescent X-ray analysis apparatus

Details Fluorescent X-ray analysis apparatus Fluorescent X-ray analysis apparatus

2007-05-24

2008-12-30

Song, Hoon (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Fluorescence

C378S044000

Reexamination Certificate

active

07471763

ABSTRACT:
To provide a fluorescent X-ray analysis apparatus using a polarization for effectively measuring a minute portion of a sample surface without a necessary to prepare many kinds of secondary targets. A fluorescent X-ray analysis apparatus according to the present invention includes an X-ray tube for generating an X-ray; a sample support portion for supporting a sample receiving the X-ray; a polarization filter for receiving an X-ray to be generated from the sample receiving the X-ray; and a detector for detecting the X-ray from the polarization filter. Then, the X-ray tube, the sample, the polarization filter, and the detector are arranged so that three light paths, namely, a light path from the X-ray tube to the sample, a light path from the sample to the polarization filter, and a light path from the polarization filter to the detector intersect with each other at 90 degrees.

REFERENCES:
patent: 3944822 (1976-03-01), Dzubay
patent: 6049589 (2000-04-01), Sipila
patent: 0 887 639 (1998-12-01), None
patent: 1045094 (1983-09-01), None
Search Report issued Oct. 11, 2007 in European patent application No. 07252275.8.

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