Fluorescent X-ray analysis apparatus

X-ray or gamma ray systems or devices – Specific application – Fluorescence

Reexamination Certificate

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Details

C378S045000, C378S084000, C378S145000

Reexamination Certificate

active

06885726

ABSTRACT:
A fluorescent X-ray analysis apparatus includes: an X-ray generation source for radiating a beam of primary X-rays; spectroscopic elements circularly arranged so that their inner surfaces describe a circle centered on an optical axis of the beam of primary X-rays for monochromatizing the beam of primary X-rays and condensing the beam on a surface of an irradiation object; a spectroscopic element position adjuster for adjusting the positions of the spectroscopic elements; secondary X-rays detector for detecting secondary X-rays radiated from the surface of the irradiation object irradiated with the monochromatized beam of primary X-rays; a secondary X-ray detector position adjuster adjusting the position of the secondary X-ray detector; an irradiation object surface position detector detecting the position of the surface of the irradiation object; and a controller adjusting the positions of the spectroscopic elements through the spectroscopic element position adjuster to condense the monochromatized beam of primary X-rays on the surface of the irradiation object, on the basis of the position of the surface of the irradiation object detected by the irradiation object surface position detector.

REFERENCES:
patent: 6023496 (2000-02-01), Kuwabara
patent: 6226347 (2001-05-01), Golenhofen
patent: 6442236 (2002-08-01), Utaka
patent: 11-052096 (1999-02-01), None
patent: 2001-133421 (2001-05-01), None

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