Fluorescent microanalytical system and method for detecting and

Details Fluorescent microanalytical system and method for detecting and Fluorescent microanalytical system and method for detecting and

1977-01-11

1978-05-02

Willis, Davis L.

Radiant energy

Radiation tracer methods

250461R, G09K 300

Patent

active

040876853

ABSTRACT:
A rapid, non-destructive system and method for insitu detection and identification of luminescent organic particulates or films on non-luminescent devices, such as semiconductor wafers and chips. The major optical components of the system comprises a luminescent vertical illuminator, an image device and a detector. The method is based on the principle that a very large number of organic materials luminesce when excited by ultraviolet radiation. By scanning the luminescent emission spectra of the known organic materials used in manufacture, a characteristic curve of intensity versus wavelength is obtained and matched to curves of known organic materials, thereby permitting detection and identification of the particulates.

REFERENCES:
patent: 3774030 (1973-11-01), O'Connor et al.
patent: 3939350 (1976-02-01), Kronick et al.

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