Fluidized bed reactor with microwave heating system for preparin

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Fluidized bed

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118716, 422146, 422199, 427213, B01J 842

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active

047864770

ABSTRACT:
An apparatus for preparing high-purity polycrystalline silicon is constructed with a heating applicator, a vertical fluidized bed quartz reactor within the applicator, a microwave generator, microwave guide tubes for conveying microwaves from the microwave generator to the applicator, a reacting gas inlet and outlet, a gas distribution device for distributing reacting gas within the reactor, a silicon seed inlet for introducing silicon seed into the reactor, and an outlet for withdrawing polycrystalline silicon from the reactor. The microwaves provide the heat for the fluidized bed reaction.

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Richard Hogle, George Hsu, and Ralph Lutwack: Jet Propulsion Laboratory "Low-Cost Solar Array Project" 5101-89, pp. 4-6-4-8.
Henry F. Erk: "Chlorosilane Thermodynamic Equilibria Calculations with Applications to High Purity Silicon Preparation", pp. 30-47, Feb. 1983.
Union Carbide Corporation Report: "Flat-plate Solar Array Project" Final Report Phase III, Apr. 1979-Dec. 1981, pp. 217-227,
D. J. DeLong: "Advances in Dichlorosilane Epitaxial Technology", Solid State Tech. Oct. 1972.
J. F. Franz: "Design for Fluidization" Chemical Engineering, Oct. 1, pp. 89-96 (1962).

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