Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1979-02-23
1981-09-29
Rubinson, Gene Z.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427213, 427 86, 118716, 219 1041, 219 1081, 219 1065, 423349, 422146, 422240, C01B 3300, H05B 654
Patent
active
042923441
ABSTRACT:
Capacitive electrical heating of a fluidized bed enables the individual solid particles within the bed to constitute the hottest portion thereof. This effect is achieved by applying an A. C. voltage potential between dielectric coated electrodes, one of which is advantageously the wall of the fluidized bed rejection zone, sufficient to create electrical currents in said particles so as to dissipate heat therein. In the decomposition of silane or halosilanes in a fluidized bed reaction zone, such heating enhances the desired deposition of silicon product on the surface of the seed particles within the fluidized bed and minimizes undesired coating of silicon on the wall of the reaction zone and the homogeneous formation of fine silicon powder within said zone.
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"Low Cost Silicon Solar Array Project", Quarterly Progress Report by Union Carbide Corp., Oct.-Dec. 1977, Publication Date: 3-2-78.
Leung Philip H.
McCarthy, Jr. Frederick J.
Rubinson Gene Z.
Union Carbide Corporation
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