Conveyors: fluid current – With means to control conveying fluid or movement of load in... – Control of conveying fluid
Patent
1976-12-23
1980-07-08
Nase, Jeffrey V.
Conveyors: fluid current
With means to control conveying fluid or movement of load in...
Control of conveying fluid
406 84, 406 87, B65G 5102
Patent
active
042115051
ABSTRACT:
The invention taught is an apparatus and method for providing automatic or semiautomatic interconnections and intersections in a fluidic transportation system. In particular the teaching relates to the transportation of semiconductor wafers or slices between processing stations on a dual highway type system utilizing a fluidic cushion means whereby said wafers can be processed in a random manner and transported under a controlled environment dissimilar to the processing environment. However, the track and system may be constructed into a multiplicity of configurations and is not limited to a dual or single track system.
REFERENCES:
patent: 3976329 (1976-08-01), Adams et al.
patent: 3976330 (1976-08-01), Babinski et al.
IBM Technical Disclosure Bulletin; vol. 18, No. 6; by Gruber et al.; pp. 1865-1866; Nov. 1975.
IBM Technical Disclosure Bulletin; vol. 17, No. 8; by Kehagioglou et al.; pp. 2319-2320; Jan. 1975.
IBM Technical Disclosure Bulletin; vol. 17, No. 8; by Noteware et al.; p. 2340; Jan. 1975.
IBM Technical Disclosure Bulletin; vol. 16, No. 2; by Babinski; pp. 469-470; Jul. 1973.
Babinski John P.
Bertelsen Bruce I.
Raacke Karl H.
Sirgo Valdeko H.
International Business Machines - Corporation
Limanek Stephen J.
Nase Jeffrey V.
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