Fluidic MEMS device

Details Fluidic MEMS device Fluidic MEMS device

2007-12-18

2007-12-18

Sines, Brian (Department: 1743)

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

C422S050000, C422S068100, C422S081000, C422S082000, C422S105000, C422S105000, C422S105000, C436S043000, C436S052000, C436S053000, C436S174000, C436S177000, C436S180000

Reexamination Certificate

active

10606023

ABSTRACT:
A fluidic micro electro-mechanical system (MEMS) device is described. In one aspect, at least one at least partially covered fluidic channel is formed between a polymer layer and a polymer substrate as the polymer layer is deposited on the substrate. The partially covered fluidic channel is fabricated as a unitary polymer layer structure. In one implementation, a strong exposure process is applied to the polymer layer to create a deep cross-linked polymer region. A weak exposure process is applied to the polymer layer to create a shallow cross-linked polymer region.

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