Fluidic demand apparatus and MEMS flow sensor for use therein

Measuring and testing – Volume or rate of flow – Element

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C417S413200

Reexamination Certificate

active

07343796

ABSTRACT:
A microvalve sensor for sensing fluid flow therethrough and generating an electrical signal indicative thereof comprises: a housing connectable inline with a fluid passageway; a microvalve disposed in the housing to permit fluid to flow unidirectionally through the housing, the microvalve including: a substrate; an insulating layer disposed over the substrate, the substrate and insulating layer including an orifice to accommodate fluid flow through the housing; and a diaphragm element disposed over the insulating layer, the diaphragm element including: a solid center portion having an area sufficient to cover the orifice, and an outer portion surrounding the center portion having a plurality of apertures for passing fluid from the orifice through the housing, the outer portion being affixed to the insulating layer around a periphery thereof, the diaphragm element and substrate forming opposite plates of a capacitor having a capacitance which changes with fluid flow through the housing; and a circuit coupled across the opposite plates of the capacitor and powered by an electrical source for measuring the capacitance of the capacitor and generating an electrical signal indicative thereof.

REFERENCES:
patent: 5417235 (1995-05-01), Wise et al.
patent: 5529465 (1996-06-01), Zengerle et al.
patent: 5755408 (1998-05-01), Schmidt et al.
patent: 6105904 (2000-08-01), Lisy et al.
patent: 6354839 (2002-03-01), Schmidt et al.
patent: 6743021 (2004-06-01), Prince et al.
patent: 6752152 (2004-06-01), Gale et al.
patent: 7013726 (2006-03-01), Drummond et al.
GP-03X MEMS MicroValve, iACTIV Corporation, Version 1.2, Feb. 2003.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Fluidic demand apparatus and MEMS flow sensor for use therein does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fluidic demand apparatus and MEMS flow sensor for use therein, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fluidic demand apparatus and MEMS flow sensor for use therein will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3979613

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.