Fluidic demand apparatus and MEMS flow sensor for use therein

Details Fluidic demand apparatus and MEMS flow sensor for use therein Fluidic demand apparatus and MEMS flow sensor for use therein

2006-03-21

2006-03-21

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Element

C417S413200

Reexamination Certificate

active

07013726

ABSTRACT:
A microvalve sensor for sensing fluid flow therethrough and generating an electrical signal indicative thereof comprises: a housing connectable inline with a fluid passageway; a microvalve disposed in the housing to permit fluid to flow unidirectionally through the housing, the microvalve including: a substrate; an insulating layer disposed over the substrate, the substrate and insulating layer including an orifice to accommodate fluid flow through the housing; and a diaphragm element disposed over the insulating layer, the diaphragm element including: a solid center portion having an area sufficient to cover the orifice, and an outer portion surrounding the center portion having a plurality of apertures for passing fluid from the orifice through the housing, the outer portion being affixed to the insulating layer around a periphery thereof, the diaphragm element and substrate forming opposite plates of a capacitor having a capacitance which changes with fluid flow through the housing; and a circuit coupled across the opposite plates of the capacitor and powered by an electrical source for measuring the capacitance of the capacitor and generating an electrical signal indicative thereof.

REFERENCES:
patent: 5529465 (1996-06-01), Zengerle et al.
patent: 5755408 (1998-05-01), Schmidt et al.
patent: 6105904 (2000-08-01), Lisy et al.
patent: 6354839 (2002-03-01), Schmidt et al.
patent: 6743021 (2004-06-01), Prince et al.
patent: 6752152 (2004-06-01), Gale et al.
GP-03X MEMS MicroValve, iACTIV Corporation, Version 1.2, Feb. 2003.

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