Fluid transport circuit and valve structure therefor

Details Fluid transport circuit and valve structure therefor Fluid transport circuit and valve structure therefor

1997-12-15

1999-12-28

Hepperle, Stephen M.

Valves and valve actuation

Electrically actuated valve

Including solenoid

137606, F16K 3106

Patent

active

060070463

ABSTRACT:
An open/close valve construction for use in solid-state fluid transport circuits having discrete fluid passageways formed in rigid substrates with a substrate land between port regions of the fluid passageways. The valve construction comprises a diaphragm disk having a dome portion overlying the substrate land and port regions and having a self-restoring resilience sufficient to maintain its dome configuration against substantial line vacuum. A valve actuator is located above the dome portion and spring biased to compress the dome into a flat configuration closing the port regions. Means for negating the spring force are provided to allow the dome portion to restore its configuration and open the valve.

REFERENCES:
patent: 4304257 (1981-12-01), Webster
patent: 4944487 (1990-07-01), Holtermann
patent: 5083742 (1992-01-01), Wylie et al.
patent: 5176359 (1993-01-01), Leveson et al.
patent: 5203368 (1993-04-01), Barstow et al.
patent: 5316034 (1994-05-01), Farnsworth et al.
patent: 5496009 (1996-03-01), Farrell et al.

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