Fluid thermal mass flow sensor

Measuring and testing – Volume or rate of flow – Thermal type

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G01F 168

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active

057929521

ABSTRACT:
A fluid thermal mass flow meter including a composite flow tube having four tubular segments of high thermal conductivity formed in a length of tube made of a material having a relatively low thermal conductivity, a thin film element formed on the surface of and extending around each of the four tubular segments, circuitry for incorporating the elements into a bridge circuit, and a housing for containing the flow tube, elements, and circuitry.

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