Measuring and testing – Volume or rate of flow – Thermal type
Patent
1996-05-23
1998-08-11
Dombroske, George M.
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
057929521
ABSTRACT:
A fluid thermal mass flow meter including a composite flow tube having four tubular segments of high thermal conductivity formed in a length of tube made of a material having a relatively low thermal conductivity, a thin film element formed on the surface of and extending around each of the four tubular segments, circuitry for incorporating the elements into a bridge circuit, and a housing for containing the flow tube, elements, and circuitry.
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Auyang Hunter
Dombroske George M.
Thompson Jewel
Varian Associates Inc.
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