Fluid supplying and processing device

Details Fluid supplying and processing device Fluid supplying and processing device

1991-02-25

1991-10-22

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

1341041, 134169C, 134170, 134 99, 239112, B08B 302

Patent

active

050586106

ABSTRACT:
A fluid supplying and processing device has a plurality of fluid guide pipes having distal ends opening above a workpiece such as a disc base. The open ends of the fluid guide pipes discharge respective different processing fluids supplied from respective fluid sources toward the workpiece for thereby processing the workpiece, such as to form a photoresist pattern on the surface of the disc base. At least one of the fluid guide pipes has at least a distal end portion inserted in another of the fluid guide pipes. The outer side surface of the distal end portion of said one fluid guide pipe is cleaned by a fluid flowing through the other surrounding fluid guide pipe.

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