Fluid storage and dispensing vessel with modified high surface a

Details Fluid storage and dispensing vessel with modified high surface a Fluid storage and dispensing vessel with modified high surface a

1998-05-18

2000-02-22

Spitzer, Robert H.

Gas separation: processes

Solid sorption

Including reduction of pressure

95106, 95128, 95132, 95133, 95136, 95142, 95143, 96108, 96146, 96147, B01D 5304

Patent

active

060275472

ABSTRACT:
A fluid storage and dispensing system, comprising: a fluid storage and dispensing vessel constructed and arranged for selective dispensing of fluid therefrom; a solid-phase support in the vessel; and an affinity medium on the solid-phase support, wherein the affinity medium reversibly takes up the fluid when contacted therewith, and from which the fluid is disengagable under dispensing conditions. The affinity medium may be a liquid, oil, gel, or solid (porous solid, thin film solid, or bulk solid). The system of the invention may be employed for the storage and dispensing of fluids such as hydride, halide and dopant gases for manufacturing of semiconductor products.

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