Gas separation: processes – Solid sorption – Inorganic gas or liquid particle sorbed
Reexamination Certificate
2011-05-31
2011-05-31
Lawrence, Frank M (Department: 1775)
Gas separation: processes
Solid sorption
Inorganic gas or liquid particle sorbed
C206S000700
Reexamination Certificate
active
07951225
ABSTRACT:
Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.
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Unpublished U.S. Appl. No. 12/666,208, filed Dec. 22, 2009.
Arno Jose I.
Hultquist Steven J.
McManus James V.
Olander W. Karl
Van Buskirk Peter C.
Advanced Technology & Materials Inc.
Hultquist Steven J.
Hultquist IP
Lawrence Frank M
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