Measuring and testing – Liquid analysis or analysis of the suspension of solids in a... – By vibration
Patent
1997-05-16
1999-03-02
Williams, Hezron E.
Measuring and testing
Liquid analysis or analysis of the suspension of solids in a...
By vibration
73 6149, 73 5441, 73592, 73 2401, 310313R, 310337, G01L 904, H01L 4110, G01N 2904
Patent
active
058774114
ABSTRACT:
A fluid sensor includes a base body 2 having a vibrating portion 7, a piezoelectric element 3 which is fixed onto one surface of the vibrating portion 7 and has a piezoelectric film 4 and at least a pair of electrodes 5a, 5b which are disposed in contact with the piezoelectric film 4, an electrode terminal 6 which is disposed on the surface of the base body 2 and electrically connected to the pair of electrodes 5a, 5b, a coating material 8 which is disposed on the surface of the base body 2 in the periphery of the electrode terminal 6; pressure plates 14a, 14b, and a sealing member 12 which is held between the base body 2 and the pressure plates 14a, 14b and formed so as to surround the electrode terminal 6, wherein the electrode terminal 6 is held gas-tightly and/or liquid-tightly with respect to a fluid to be measured by holding the sealing member 12 between the coating material 8 and the pressure plates 14a, 14b.
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Nakao Shigeki
Namerikawa Masahiko
Shibata Kazuyoshi
Takeuchi Yukihisa
NGK Insulators Ltd.
Wiggins J. David
Williams Hezron E.
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