Fluid sensing device having reduced attenuation of shear transve

Details Fluid sensing device having reduced attenuation of shear transve Fluid sensing device having reduced attenuation of shear transve

1992-02-28

1993-06-01

Stephan, Steven L.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, H01L 4104

Patent

active

052163121

ABSTRACT:
A fluid sensing device such as a Shear Transverse Wave device or a Love Wave device having a wave-trapping structure that provides tight surface trapping at transduction and sensing regions, but permitting a deeper penetration of wave energy at the interface of a seal with the wave-trapping structure. In the STW device, wave-trapping fingers are selectively varied in thickness, width or both to achieve the selective trapping. In an LW device, a wave-trapping plate is reduced in thickness at seal regions.

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patent: 4918349 (1990-04-01), Shiba et al.
patent: 4933588 (1990-06-01), Greer
patent: 4965479 (1990-10-01), Elliott et al.
patent: 5111168 (1992-05-01), Panasik et al.
Wenzel et al., "Flexural Plate-wave Gravimetric Chemical Sensor", Sensors and Actuators, A21-A23 (1990), pp. 700-703.
Martin et al., "Characterization of SH Acoustic Plate Mode Liquid Sensors", Sensors and Actuators, 20 (1989), pp. 253-268.
D. F. Thompson, "Temperature Compensation of Microwave Acoustic Resonators", doctoral dissertation for Stanford University, Jun. 1986, Chapter III.

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