Pumps – Condition responsive control of pump drive motor – In response to pump speed
Patent
1991-08-01
1993-03-30
Bertsch, Richard A.
Pumps
Condition responsive control of pump drive motor
In response to pump speed
417 45, 417203, 417205, 4174234, 4182011, 318 77, 318 85, F04C 2300, F04D 1904
Patent
active
051978610
ABSTRACT:
A fluid rotating apparatus according to the present invention is designed to promptly achieve an extremely high degree of vacuum from promptly atmospheric pressure promptly by its single apparatus. Moreover, high-speed synchronous rotation of the rotary shafts of the apparatus is controlled by use of a rotary position detecting sensor, to thereby avoid control mechanical contact thereof with a gear or the like. In addition, hydrostatic bearing are employed for supporting the rotary shafts to avoid of mechanical abrasion and the use of lubricant oil.
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"A New Molecular Pump", Louise Maurice, Proc. 6th Internal. Vacuum Congru. Sep. 1974 Japan, J. Appl. Phys. Suppl. 2, Pt. 1, Aug. 1974.
Abe Yoshikazu
Hasegawa Mikio
Maruyama Teruo
Taguchi Tatsuhisa
Bertsch Richard A.
Matsushita Electric - Industrial Co., Ltd.
Scheuermann David W.
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