Fluid protective wall cover in a vapor deposition chamber

Details Fluid protective wall cover in a vapor deposition chamber Fluid protective wall cover in a vapor deposition chamber

1978-05-05

1980-01-15

Kaplan, Morris

Coating processes

Coating by vapor, gas, or smoke

118 49, 427294, B05D 100, C23C 1100

Patent

active

041839820

ABSTRACT:
A method of producing a high vacuum in a vacuum container which has an exst connection line connected thereto and using an interior protective covering for the walls of the container and a protective gas comprises, applying covering to the interior of the container so as to shield the inner walls thereof and to also shield the exhaust connection thereto, directing a protective gas into the space between the covering the interior walls of the container, preferably during the flooding in which the container is opened, and thereafter evacuating the interior of the container through the exhaust connection and heating the covering. The vacuum treatment device, such as a device for evaporating materials from vapor deposition, comprises a closed container having interior walls with a thin-walled metal sheet forming a covering arranged in spaced relationship to the interior walls so as to shield a major area of the walls and to define a space between the walls and the covering. A connecting line for introducing a protective gas into the container in the space between the walls and the covering is provided, and in addition an exhaust gas line is connected to the container and to an evacuating pump for evacuating the container. A thin-walled metal screen is arranged in the container and shields at least a portion of the exhaust line, and heater means are provided for heating both the covering and the shield.

REFERENCES:
patent: 3183888 (1965-05-01), Blackman
patent: 3201290 (1965-08-01), Wyss
patent: 3446659 (1969-05-01), Wisman
patent: 3466191 (1969-09-01), Stinchfield
patent: 3573888 (1971-04-01), Bogart
patent: 3649339 (1972-03-01), Smith
patent: 3800738 (1974-04-01), Tassara
patent: 3876410 (1975-04-01), Scholes
patent: 3974003 (1976-08-01), Zirinsky et al.
patent: 4046101 (1977-09-01), Winkler

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