Fluid pressure measuring apparatus for measuring pressure by usi

Details Fluid pressure measuring apparatus for measuring pressure by usi Fluid pressure measuring apparatus for measuring pressure by usi

1998-04-07

2000-06-20

Oen, William

Measuring and testing

Fluid pressure gauge

Combined

73721, 73727, G01L 700, G01L 906

Patent

active

060764082

ABSTRACT:
A pressure in a pressurizing chamber of a micromachine apparatus for transferring a fluid is measured inexpensively under an actual-use or a similar condition. A piezoelectric element used as an actuator for applying a pressure to the fluid in the pressurizing chamber is also used as a pressure sensor. A charge amplifier is used to measure the amount of charge Q.sub.1 applied to an electrode of the piezoelectric element when the piezoelectric element is driven while the pressurizing chamber filled with the fluid, and the amount of charges Q.sub.2 when the piezoelectric element is driven while the chamber contains no fluid. The obtained signals are inputted to a storage and operation processing device to determine (Q.sub.1 -Q.sub.2) to determine the pressure of the fluid in the pressurizing chamber. The piezoelectric element or capacitor for the purposes of comparison can be used to simultaneously measure Q.sub.1 and Q.sub.2.

REFERENCES:
patent: 5259248 (1993-11-01), Ugai et al.
patent: 5481920 (1996-01-01), Nara

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