Fluid pressure detector using a diaphragm

Details Fluid pressure detector using a diaphragm Fluid pressure detector using a diaphragm

1997-08-28

2000-09-12

Patel, Harshad

Measuring and testing

Fluid pressure gauge

Diaphragm

73720, 73726, G01L 708, G01L 904

Patent

active

06116092&

ABSTRACT:
A good quality passive-state film is formed on a gas-contact face of a diaphragm of a pressure detector using a sensor chip to prevent corrosion on, or water content emission from, or catalytic action at a gas-contact face, thereby improving production quality in a semiconductor manufacturing process and providing high accuracy pressure detection. The passive-state film is formed on the gas-contact face of the diaphragm when the diaphragm is mounted on a diaphragm base. The diaphragm base is then fixedly secured to a sensor base in which a sensor chip is housed and a pressure transmitting medium is sealed in a gap between the sensor base and the diaphragm base.

REFERENCES:
patent: 5230248 (1993-07-01), Cucci et al.
patent: 5243222 (1993-09-01), Harper et al.
patent: 5569334 (1996-10-01), Kawata et al.
patent: 5746841 (1998-05-01), Koike et al.

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