Fluid sprinkling – spraying – and diffusing – Rigid fluid confining distributor – Fluidic oscillator
Patent
1998-04-03
2000-08-22
Morris, Lesley D.
Fluid sprinkling, spraying, and diffusing
Rigid fluid confining distributor
Fluidic oscillator
B05B 100
Patent
active
061058858
ABSTRACT:
An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle (22) may include a nozzle cavity (110) disposed within a nozzle body (100) between an up-stream end (102) and a down-stream end (104). A nozzle passage (118) may be defined within the nozzle cavity (110) and extend a longitudinal length (120) from the down-stream end (104) of the nozzle body (100) into the nozzle cavity (110). A discharge orifice (124) may also be defined at the down-stream end (104) of the nozzle cavity (110) and have an associated width (126). The width (126) of the discharge orifice (124) may be substantially less than the longitudinal length (120) of the nozzle passage (118).
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Calia Vincent S.
Gutowski Robert M.
Haas Edwin G.
Advanced Energy Systems Inc.
Morris Lesley D.
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