Fluid mass flow controller device and method

Details Fluid mass flow controller device and method Fluid mass flow controller device and method

1997-10-17

2000-02-22

Lee, Kevin

Fluid handling

Processes

137270, G05D 706

Patent

active

060268344

ABSTRACT:
The present invention provides a technique for controlling fluid flows through a mass flow controller ("MFC") device 10 in different directions. The technique includes a device 10 having a novel control valve assembly design for selectively providing an upstream or downstream configuration without exchanging parts or requiring additional parts.

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