Fluid mass flow controller

Details Fluid mass flow controller Fluid mass flow controller

1985-05-17

1987-08-18

Cohan, Alan

Fluid handling

Line condition change responsive valves

Pilot or servo controlled

1374875, F16K 3102

Patent

active

046870202

ABSTRACT:
A fluid mass flow controller for maintaining the flow of a fluid at a predetermined rate despite fluctuations in inlet fluid pressure. The controller employs a sensor to measure the rate of flow of the fluid downstream from a control valve; negative feedback is generated from the sensor output and is used to regulate the valve setting to maintain a constant flow at the predetermined rate.

REFERENCES:
patent: 3601124 (1971-08-01), Petree
patent: 4390041 (1983-06-01), Reip
patent: 4476893 (1984-10-01), Schwelm
patent: 4508127 (1985-04-01), Thurston

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