Fluid level sensing method and apparatus

Details Fluid level sensing method and apparatus Fluid level sensing method and apparatus

1988-11-21

1989-11-21

Yasich, Daniel M.

Signals and indicators

Indicators

Liquid level

55 18, 55274, 73293, 141 65, 141 95, 222 23, 250577, B65B 304, G01N 2127, G01N 110

Patent

active

048814873

ABSTRACT:
A fluid level sensor is provided in a fluid dispensing system, primarily in a photoresist dispensing system used in a semiconductor manufacturing process. A bubble is introduced into the fluid shortly before fluid supply is emptied, said bubble being used to detect a low fluid level. The invention uses a snap-on combination cap and pickup tube, the pickup tube having a small hole near its lower tip, and the cap containing an optical bubble detector.

REFERENCES:
patent: 3269609 (1966-08-01), Ahrens
patent: 3894240 (1975-07-01), Rose
patent: 4311492 (1982-01-01), Eltvedt
patent: 4399711 (1983-08-01), Klein
patent: 4410020 (1983-10-01), Lorenz
patent: 4756348 (1988-07-01), Moller

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