Fluid jet seed particle generator for silane pyrolysis reactor

Details Fluid jet seed particle generator for silane pyrolysis reactor Fluid jet seed particle generator for silane pyrolysis reactor

1981-12-11

1984-01-03

Thomas, Earl C.

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

241 5, 427213, 423DIG16, C01B 3302, B05D 700, B02C 1906

Patent

active

044241992

ABSTRACT:
Method is provided for generating fine sized seed particles of silicon for use in the fluidized bed pyrolysis of silane.

REFERENCES:
patent: 3012861 (1961-12-01), Ling
patent: 3012862 (1961-12-01), Bertrand et al.
patent: 3897010 (1975-07-01), Weishaupt et al.
patent: 4092446 (1978-05-01), Padovani et al.
patent: 4172667 (1979-10-01), Zenz et al.
patent: 4207360 (1980-06-01), Padovani

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