Fluid isolated self-compensating absolute pressure sensor transd

Details Fluid isolated self-compensating absolute pressure sensor transd Fluid isolated self-compensating absolute pressure sensor transd

1990-07-19

1991-07-09

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

With protective separator

73708, 73726, 73729, 338 4, G01L 712, G01L 904

Patent

active

050294784

ABSTRACT:
An absolute pressure sensor capsule and sensor resulting therefrom are disclosed. In one preferred embodiment, the capsule includes a sensor die of a first material, an intermediate spacer of a second material joined to the die and a base plate of a third material, the base plate having a variable thickness for changing the span shift, null shift, and static pressure of the die while compensating for changes in the calibration of the electrical die components.

REFERENCES:
patent: 3247719 (1966-04-01), Chelner
patent: 3427884 (1969-02-01), Delmonte
patent: 4006640 (1977-02-01), Gealt
patent: 4184189 (1980-01-01), Davis et al.
patent: 4196632 (1980-04-01), Sikorra
patent: 4321578 (1982-03-01), Nagasu et al.
patent: 4399707 (1983-08-01), Wamstad
patent: 4467394 (1984-08-01), Grantham et al.
patent: 4498070 (1985-02-01), Lirman
patent: 4600912 (1986-07-01), Marks et al.

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