Coating apparatus – Projection or spray type – Moving projector
Reexamination Certificate
2005-05-25
2008-08-26
Tadesse, Yewebdar T (Department: 1792)
Coating apparatus
Projection or spray type
Moving projector
C118S321000, C239S223000, C239S477000
Reexamination Certificate
active
07416607
ABSTRACT:
A fluid injection apparatus for discharging a fluid against a surface in a controlled manner is disclosed. The fluid injection apparatus includes at least one fluid supply conduit, at least one rotatable and vertically-movable fluid injector provided in fluid communication with the fluid supply conduit and at least one fluid conduit provided in the fluid injector. By selective vertical movement of the fluid injector, each fluid conduit in the fluid injector can be selectively blocked from or provided in fluid communication with the fluid supply conduit to impart a desired flow configuration of a processing fluid against the surface. By selective rotational movement of the fluid injector, a rotational or swirling motion can be imparted to the fluid as it contacts the surface.
REFERENCES:
patent: 2103887 (1937-12-01), Bowen et al.
patent: 5368234 (1994-11-01), Foster et al.
patent: 5584435 (1996-12-01), Lind
patent: 2004/0140378 (2004-07-01), Merabet
patent: 2005/0172892 (2005-08-01), Thome et al.
Chung Cha-Hong
Lin Kun-Tzu
Tadesse Yewebdar T
Taiwan Semiconductor Manufacturing Co. Ltd.
Tung & Associates
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