Electric resistance heating devices – Heating devices – Continuous flow type fluid heater
Patent
1994-12-22
1998-04-14
Hoang, Tu B.
Electric resistance heating devices
Heating devices
Continuous flow type fluid heater
392483, 392490, 219298, F24H 110
Patent
active
057403155
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to fluid heating apparatus for heating mainly pure water and chemical liquid, and more particularly, to fluid heating apparatus adapted to be used for washing liquid temperature adjusting apparatus for production of semiconductors, chemical liquid temperature adjusting apparatus, plating liquid adjusting apparatus, liquid temperature adjusting apparatus for production of foods, etc.
BACKGROUND TECHNOLOGY
For example, as a washing liquid temperature adjusting apparatus for production of semiconductors, there is provided one having a structure in which the heating vessel is formed of a quartz glass in a view point of prevention of contamination of a liquid to be heated and a heater as a heating source is disposed in a quartz glass tube so as not to directly contact the liquid. Furthermore, in a view point of improvement of heating efficiency, a halogen lamp has been increasingly utilized in place of a heater with a nichrome wire as a heating source.
As a conventional fluid heating apparatus of the structure described above, one example is disclosed in the Japanese Utility Model Laid-open Publication No. HEI 2-52437, and in this example, as shown in FIG. 1, a heating vessel h is commonly utilized as a treating tank for a material to be washed and a heater b is inserted into a quartz glass tube a.
Another example such as disclosed in the Japanese Utility Model Laid-open Publication No. SHO 62-22462 is, as shown in FIG. 2, a continuous heating apparatus in which a plurality of heating vessels i, in each of which a heater d is disposed in a double-walled hollow tube c made of a quartz glass, are connected so as to continuously heat the fluid.
Furthermore, there is provided another prior art showing a continuous heating apparatus for increasing heating ability, in which, as shown in FIG. 3, a plurality of heating vessels g are connected in series, and in each of the heating vessels g, a plurality of inner tubes f are disposed, so as to be freely taken in and out, in an outer tube e formed of a quartz glass and heaters j each composed of a halogen lamp and disposed in each of the inner tubes f.
However, the prior art mentioned above involves problems of (1) enlargement of a dimension of the apparatus, (2) air-bubble staying or liquid staying, and these problems are mentioned hereunder respectively.
(1) Enlargement of Apparatus
It is inevitable to utilize a quartz glass to prevent contamination of a fluid to be heated as shown in FIG. 1 and disclosed in the Japanese Utility Model Laid-open Publication No. HEI 2-52437, but in such case, the heating vessel h also serves as a treating tank for a material to be washed, resulting in an enlargement of the heating vessel h.
Furthermore, in the apparatus shown in FIG. 2 and disclosed in the Japanese Utility Model Laid-open Publication No. SHO 62-22462, the heating vessel i is disposed with an inclination so as to make smooth the fluid flow in the heating vessel and to prevent air-bubble escape and liquid staying, but in this case, the inclinations of the respective heating vessels i have different orientations providing a zigzag appearance at a time when a plurality of heating vessels i are arranged, thus making large a pitch between adjacent heating vessels i, requiring much space.
In addition, in the apparatus of the Japanese Utility Model Laid-open Publication No. SHO 62-22462, the heating vessels i increased in number are arranged for achieving highly improved heating efficiency, but a long duct for connection between the respective heating vessels i is utilized, so that in a case where a plurality of heating vessels i are arranged, an entire height of the heating apparatus becomes large, thus providing a problem.
Still furthermore, in the apparatus of the structure shown in FIG. 3, the heating vessel g comprises the outer tube e made of quartz glass and a plurality of inner tubes f disposed inside the outer tube e and the heaters j are arranged therein to constitute the heating vessel g as a single unit to obtain a
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International Search Report, Sep. 21, 1993.
Onishi Tetsuo
Takamatsu Hiromasa
Tsubota Makio
Hoang Tu B.
Kabushiki Kaisha Komatsu Seisakusho
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