Fluid flow rate sensor and method of operation

Details Fluid flow rate sensor and method of operation Fluid flow rate sensor and method of operation

2011-08-16

2011-08-16

Dunn, Drew A (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

Reexamination Certificate

active

08000907

ABSTRACT:
A probe for a thermo-anemometer-type fluid flow rate sensor is disclosed. The probe comprises a tubular body member having a thermally conductive housing disposed within a fluid passageway and a detection module in the housing. The detection module includes a detection circuit and a heating circuit and is adapted to provide an output that varies in response to a change in temperature. The detection module is made from a ceramic substrate upon which the detection circuit and the heating circuit are deposited.

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