Fluid flow detector

Details Fluid flow detector Fluid flow detector

1987-10-14

1990-03-20

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320421, 73 27R, 338 25, 338318, G01F 168

Patent

active

049090780

ABSTRACT:
A thermal effect sensing device comprises a semiconductor substrate supporting an insulating layer which has a thin film of platinum deposited on it. Holes are etched through the semiconductor substrate and the insulating layer. The platinum film is shaped to provide a serpentine resistive element suspended over one of the holes. The serpentine element is suspended from the rim of the hole, but is otherwise unsupported. The resistive element has a low thermal mass and there is a low thermal resistance between the element and fluid in the sensor. The sensor senses thermal properties of the fluid in the sensor, such as mass flow or thermal conductivity. A second conductive film is insulatingly deposited on the first film to provide a resistive sensor electrically isolated from a resistive heating element.

REFERENCES:
patent: Re30105 (1979-10-01), Rodder
patent: 3988928 (1976-11-01), Edstrom et al.
patent: 4332157 (1982-06-01), Zemel et al.
patent: 4343768 (1982-08-01), Kimura
patent: 4471647 (1984-09-01), Jerman et al.
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4474889 (1984-10-01), Terry et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4501144 (1985-02-01), Higashi et al.
patent: 4502339 (1985-03-01), Horn
patent: 4537068 (1985-08-01), Wrobel et al.
patent: 4542650 (1985-09-01), Renken et al.
patent: 4548078 (1987-10-01), Bohrer et al.
patent: 4561303 (1985-12-01), McCarthy
patent: 4576050 (1986-03-01), Lambert
patent: 4580439 (1986-04-01), Manaka
patent: 4587843 (1986-05-01), Tokura et al.
patent: 4594889 (1986-06-01), McCarthy
patent: 4608865 (1986-09-01), Muller et al.
patent: 4624137 (1986-11-01), Johnson et al.
patent: 4624138 (1986-11-01), Ono et al.
patent: 4627279 (1986-12-01), Ohta et al.
patent: 4633578 (1987-01-01), Aine et al.
patent: 4651564 (1987-03-01), Johnson et al.
patent: 4658855 (1987-04-01), Doyle
patent: 4685331 (1987-08-01), Renken
Description of "Chromatography", Encyclopedia of Instrumentation and Control, D. M. Considine, pp. 128-136.

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