Fluid flow control

Details Fluid flow control Fluid flow control

1988-11-15

1991-04-23

Hepperle, Stephen M.

Fluid handling

Systems

Dividing into parallel flow paths with recombining

137561A, 1376361, 604246, F16K 1116

Patent

active

050092510

ABSTRACT:
Disclosed is a variable fluid flow controller for regulating the rate of flow from a source of fluid under pressure, comprising a plurality of unique flow restriction passagways, a valve associated with each passageway, and a rotatable cam for selectively opening any one of the valves while maintaining the remaining valves closed. The flow restriction passageway preferably comprises a channel etched on the surface of a first silicon wafer and enclosed by a second wafer to form a fluid flow passageway, one of the first or second wafers having a plurality of apertures therethrough for intersecting the passageway at various distances along its length.

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