Liquid purification or separation – Processes – Including controlling process in response to a sensed condition
Reexamination Certificate
2011-03-29
2011-03-29
Lawrence, Frank M (Department: 1775)
Liquid purification or separation
Processes
Including controlling process in response to a sensed condition
C210S900000, C355S030000
Reexamination Certificate
active
07914687
ABSTRACT:
A method for filtering a fluid to obtain a fluid having a known purity is described. The fluid is filtered with a filtration system, and upstream of a final filtration stage of the filtration system, a purity of the fluid is measured. A purity of the fluid filtered by the filtration system is determined by correcting the measured purity with a filtration behavior of the final filtration stage. In an embodiment, the fluid comprises an ultra pure water for use as an immersion liquid in a lithographic apparatus.
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T. Matsuyama et al., &
De Graaf Roelof Frederik
Jacobs Johannes Henricus Wilhelmus
Jansen Hans
Stavenga Marco Koert
Verhagen Martinus Cornelis Maria
ASML Netherlands B.V.
Lawrence Frank M
Pillsbury Winthrop Shaw & Pittman LLP
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