Fluid handling – Systems
Reexamination Certificate
2007-01-30
2007-01-30
Chambers, A. Michael (Department: 3753)
Fluid handling
Systems
C137S828000, C137S833000, C137S340000, C118S715000, C118S725000
Reexamination Certificate
active
10433039
ABSTRACT:
The invention relates to a liquid distribution unit (10, 20) for dividing a liquid current into a plurality of partial currents. Said unit comprises at least one liquid inlet (13, 23) for the supplied liquid current, a plurality of liquid outlets (14; 24) for the partial currents, and a plurality of channels (15, 25) connecting the liquid inlets (13, 23) to the liquid outlets (14, 24). Said unit is characterised in that the channels (15, 25) symmetrically and respectively branch off (16, 26) into upstream channels (15a,15b,15c, 15d, 15c; 25a, 25b, 25c, 25d, 25c) and each connection leading from the liquid inlet (13; 23) to one of the liquid outlets (14; 24) comprises the same channels (15, 25) and the same branches (16, 26). A liquid distribution device for the divided distributiion of at least two different liquids; comprises a plurality of such liquid distribution units (10, 20) placed flatly on top of each other. One of the liquids is distributed in each liquid distribution unit (10, 20) and the other(s) is/are guided through separate passages (17, 27) in an undistributed manner. One such liquid distribution device can especially be embodied as a device for supplying gases for a CVD coating installation. In this case, at least one liquid distribution unit (10) is provided for a precursor gas optionally having a carrier gas, and at least one other liquid distribution unit (20) is provided for a reactive gas.
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Krause Ulrich
Schmidt Jürgen
Stadel Oliver
Chambers A. Michael
Salter & Michaelson
Technische Universitat Carolo-Wilhelmina Zu
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