Fluid dispersion head for CVD appratus

Details Fluid dispersion head for CVD appratus Fluid dispersion head for CVD appratus

1992-03-24

1993-12-07

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118715, 118725, 239524, C23C 1600

Patent

active

052680347

ABSTRACT:
A fluid distribution head of this invention includes a chamber for fluid flow including a perforated plate. The perforated plate is internally supported by a structural support to avoid deformation of the plate.

REFERENCES:
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patent: 3854443 (1974-12-01), Baerg
patent: 4656055 (1987-04-01), Dwyer
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patent: 5040046 (1991-08-01), Chhabra et al.
Novellus Concept One Sales Brochure, undated.

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