Fluid delivery for scanning probe microscopy

Details Fluid delivery for scanning probe microscopy Fluid delivery for scanning probe microscopy

2011-04-19

2011-04-19

Johnston, Phillip A (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

Auxiliary means serving to assist or improve the scanning...

Means for establishing or regulating a desired environmental...

C250S306000, C850S021000, C073S105000

Reexamination Certificate

active

07930766

ABSTRACT:
The following invention pertains to the introduction of a gas (or fluid) around a SPM probe or Nanotool™ to control chemical activity e.g. oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or nanotools and to provide vacuum at and around the tip and substrate area. The invention can also produce electrical current for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1 nm or less).

REFERENCES:
patent: 4244783 (1981-01-01), Corbett et al.
patent: 5684301 (1997-11-01), Cresswell et al.
patent: 6287765 (2001-09-01), Cubicciotti
patent: 6847036 (2005-01-01), Darling et al.
patent: 6891239 (2005-05-01), Anderson et al.

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