Coating processes – Measuring – testing – or indicating
Patent
1994-12-05
1996-02-20
Beck, Shrive
Coating processes
Measuring, testing, or indicating
427585, B05D 306, C23C 800
Patent
active
054927188
ABSTRACT:
An apparatus for processing a layer on a workpiece includes a source of reactant fluid, a reaction chamber having a support for the workpiece and a fluid delivery apparatus for feeding an input fluid into the reaction chamber with the input fluid being utilized to process the material. An infrared sensor is adapted to cooperate with the fluid delivery apparatus for sensing the concentration of a component of the input fluid. The infrared sensor includes an infrared light source positioned to direct a beam of infrared light at an infrared light detector through the input fluid. The infrared light detector produces an electrical output signal indicative of the amount of light received by the detector and therefore not absorbed by the input fluid.
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Chapple-Sokol Jonathan D.
Conti Richard A.
Cotler Tina J.
O'Neill James A.
Passow Michael L.
Ahsan Aziz M.
Beck Shrive
Huberfeld Harold
International Business Machines - Corporation
Parker Fred J.
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