Fluid handling – With heating or cooling of the system
Patent
1999-12-03
2000-10-10
Chambers, A. Michael
Fluid handling
With heating or cooling of the system
137341, 13756537, 137557, 137883, 118728, F16K 4900
Patent
active
061291080
ABSTRACT:
A fluid delivering system receives a fluid from a supplying device, transfers the fluid to an operational device and then dumps the used fluid into an extraction device. The fluid delivering system has a main pipeline system and at least a secondary pipeline system. Each pipeline system uses a first flow valve to control the back flow of fluid to a first flow controller, a second flow valve to protect a pressure gauge and a third flow valve to control the flow of fluid to a pressure controller. Through the relative positioning and the concerted actions of these three valves, any malfunctioning in the fluid delivering system can be detected quickly so that on-going processing operation can stop immediately to minimize product damages.
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Chang Morris
Hou Mike
Liu Ming-Fa
Peng Yu-Feng
Chambers A. Michael
Huang Jiawei
United Microelectronics Corp
United Semiconductor Corp
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