Fluid damped saw accelerometer

Details Fluid damped saw accelerometer Fluid damped saw accelerometer

1980-11-03

1982-06-08

Gill, James J.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

310313R, 310329, G01P 1508

Patent

active

043333427

ABSTRACT:
An accelerometer comprising a mass 10 supported on a piezoelectric cantilevered beam 12 with SAW resonators 17, 46 disposed on the surface of the beam includes cover plates 66, 68 over the SAW resonators and sealed to the beam by seals 70, 72 which may be rigid (glass frit) or soft (filled polyimid).

REFERENCES:
patent: 2909744 (1959-10-01), Giovanni
patent: 3858064 (1974-12-01), Schissler

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