Fluid control device

Details Fluid control device Fluid control device

1997-05-08

1999-11-02

Hepperle, Stephen M.

Fluid handling

With cleaner, lubrication added to fluid or liquid sealing...

Cleaning or steam sterilizing

137606, F16K 1120

Patent

active

059751126

ABSTRACT:
A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.

REFERENCES:
patent: 3797524 (1974-03-01), Sanelli
patent: 4558845 (1985-12-01), Hunkapiller
patent: 4741354 (1988-05-01), DeMild
patent: 4768543 (1988-09-01), Wienke et al.
patent: 5137047 (1992-08-01), George
patent: 5368062 (1994-11-01), Okumura et al.
patent: 5476118 (1995-12-01), Yokoyama
European Abstract No. 97107532.0, Tadahiro Ohmi et al.

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