Fluid control device

Details Fluid control device Fluid control device

1999-07-08

2000-09-12

Fox, John

Fluid handling

Systems

With flow control means for branched passages

137271, F16K 1110

Patent

active

061162833

ABSTRACT:
A fluid control device comprises a massflow controller having an inlet channel and an outlet channel, an inlet-side lower block coupling having a channel upwardly opened and communicating with the inlet channel of the massflow controller, an inlet-side connecting member adjacent to the inlet-side lower block coupling and having a channel opened upward, an inlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the inlet-side lower block coupling in communication with the channel of the inlet-side connecting member, an outlet-side lower block coupling having a channel upwardly opened and communicating with the outlet channel of the massflow controller, an outlet-side connecting member adjacent to the outlet-side lower block coupling and having a channel opened upward, and an outlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the outlet-side lower block coupling in communication with the channel of the outlet-side connecting member.

REFERENCES:
patent: 5819782 (1998-10-01), Itafuji
patent: 5983933 (1999-11-01), Ohmi et al.
patent: 5988217 (1999-11-01), Ohmi et al.

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